Two-Dimensional Perovskite Crystals Formed by Atomic Layer Deposition of CaTiO3 on γ-Al2O3

Abstract

CaTiO3 films with an average thickness of 0.5 nm were deposited onto γ-Al2O3 by Atomic Layer Deposition (ALD) and then characterized by a range of techniques, including X-ray Diffraction (XRD) and High-Resolution, Transmission Electron Microscopy (HRTEM). The results demonstrate that the films form two-dimensional crystallites over the entire surface. Lattice fringes from HRTEM indicate that the crystallites range in size from 5 to 20 nm and are oriented in various directions. Films of the same thickness on SiO2 remained amorphous, indicating that the support played a role in forming the crystallites.

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 27, 2021
Source ID
10.3390/nano11092207

Entities

People

  • Chao Lin
  • John M Vohs
  • Ohhun Kwon
  • Raymond J Gorte
  • Tianyu Cao

Organizations

  • Air Force Office of Scientific Research

Tags

Fields of Study

  • Materials science

Readers

  • Optical Physics and Photonics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene