Performance improvement of ohmic contacts on Al-rich n-AlGaN grown on single crystal AlN substrate using reactive ion etching surface treatment

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 06, 2017
Source ID
10.7567/apex.10.071001

Entities

People

  • Biplab Sarkar
  • Brian B. Haidet
  • Pramod Reddy
  • Ramón Collazo
  • Ronny Kirste
  • Zlatko Sitar

Organizations

  • Army Research Office
  • National Science Foundation