AlN metal–semiconductor field-effect transistors using Si-ion implantation
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 06, 2018
- Source ID
- 10.7567/jjap.57.04fr11
Entities
People
- Akira Uedono
- Daniel Piedra
- Hironori Okumura
- Jori Lemettinen
- Sami Suihkonen
- Tomás Palacios
- Yuhao Zhang
Organizations
- Japan Society for the Promotion of Science
- Office of Naval Research