AlN metal–semiconductor field-effect transistors using Si-ion implantation

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 06, 2018
Source ID
10.7567/jjap.57.04fr11

Entities

People

  • Akira Uedono
  • Daniel Piedra
  • Hironori Okumura
  • Jori Lemettinen
  • Sami Suihkonen
  • Tomás Palacios
  • Yuhao Zhang

Organizations

  • Japan Society for the Promotion of Science
  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics