Chip-Scale Micro Gas Analyzers

Abstract

(U) The Chip-Scale Micro Gas Analyzers program is utilizing the latest microelectromechanical systems (MEMS) technologies to implement separation-based analyzers (e.g., gas chromatographs, mass spectrometers, poly-chromator-like devices) at the micro-scale to greatly enhance the selectivity of sensors to specific species, and thus, enable extremely reliable, remote detection of chemical/biological agents. The use of MEMS technology will also increase analysis speed and made possible the operation of such complex analyzer systems at extremely low power levels-perhaps low enough for operation as autonomous, wireless sensors. The many challenges in this program include the exploration and realization of micro-scale preconcentrator approaches, stacked gas columns, multiple sensor arrays, ionizers, vacuum pumps, and vacuum packaging. The success of this program will yield sensors substantially more selective than conventional sensors, again, making them particularly suitable for detection and identification of airborne toxins. This program will also develop micro-resonators that accept and isolate narrow channels of the radio spectrum. This research would enable communication receivers that operate under any communication standard around the world. The Chip-Scale Gas Analyzers program is transitioning via industry to Chemical Warfare Agents (CWA) detector programs being developed by the Defense Threat Reduction Agency (DTRA) and the Army Soldier and Biological Chemical Command (SBCCOM).

Document Details

Document Type
Accomplishment
Publication Date
Oct 01, 2011
Source ID
1fdc39f9f224a76c29f0b041951a8750

Tags

Readers

  • Critical Infrastructure Protection in CBRN and WMD Threats.
  • Integrated Circuit Design and Technology.
  • Plasma Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems

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