Chip-Scale Technology
Abstract
The goal of the Chip-Scale Technology effort was to enhance microsystems performance by developing efficient on-chip vacuum pumps that meet application requirements for chip-scale micro-gas analyzers. Chip-Scale Technologies have the potential to improve the critical performance of microsystems such as micro mass spectrometers, nanoscale detectors, RF resonators, and vacuum microelectronic components. This program developed a high-performance integrated low-power (< 2 W) microscale (< 15 cm3) pumping (< 10-6 Torr) capability, and is transitioning via industrial performers.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2013
- Source ID
- 3f23e9bf624e2bcffd3978bca6bfb20d