N/MEMS Science and Focus Centers
Abstract
The goal of the N/MEMS Science and Focus Centers program was to support the development of an enhanced fundamental understanding in a number of technical issues considered to be critical to the continuing advance of nanoelectromechanical systems (NEMS) and microelectromechanical systems (MEMS) technologies and their transition into military systems. The program supported basic research at seven university centers responding to recognized challenges in a comprehensive range of technical areas pertinent to future DoD micro/nano technology needs. Industrial cost sharing was an important element of the program, with industry matching DARPA resources on a 1:1 basis.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2013
- Source ID
- 54b0696ea86ce609061c96c048d58883