Advanced Microsystems Technology Program
Abstract
(U)The Advanced Microsystems Technology program explores a range of advanced microsystem concepts well beyond existing current technologies. The program focus is on technologies that exploit 3-Dimensional (3-D) structures, new materials for Gieger mode detectors, advance patterning, and extreme scaling in silicon devices. Insights derived in these areas will be exploited in future program initiatives.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2011
- Source ID
- 590410463a3a548cbe2c3fc7e11c9da9
Related Documents
- Root: ELECTRONICS TECHNOLOGY