Advanced Microsystems Technology

Abstract

The Advanced Microsystems Technology program explored a range of advanced microsystem concepts well beyond existing current technologies. The program focus was on technologies that exploit 3-D structures, new materials for Geiger-mode detectors, advance patterning, and extreme scaling in silicon devices. Insights derived in these areas will be exploited in future program initiatives.

Document Details

Document Type
Accomplishment
Publication Date
Oct 01, 2012
Source ID
7d962ad359c09b20c9b2376a7bfd5cb2

Tags

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Military Science and Technology Research and Modernization.

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