Advanced Microsystems Technology
Abstract
The Advanced Microsystems Technology program explored a range of advanced microsystem concepts well beyond existing current technologies. The program focus was on technologies that exploit 3-D structures, new materials for Geiger-mode detectors, advance patterning, and extreme scaling in silicon devices. Insights derived in these areas will be exploited in future program initiatives.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2012
- Source ID
- 7d962ad359c09b20c9b2376a7bfd5cb2
Related Documents
- Root: ELECTRONICS TECHNOLOGY