Chip-Scale Technology*
Abstract
*Previously Chip-Scale Micro-Gas Analyzers. The goal of the Chip-Scale Technology effort is to enhance Microsystems performance. The current focus of the program is to develop an efficient fluid distribution capability for on-chip vacuum pumps that meet the stress application requirements. Additionally, this program will refine microresonator capabilities to accept very narrow radio spectrum channels while canceling out or eliminating others. The Chip-Scale Technologies have the potential to improve the critical performance of Microsystems such as micro mass spectrometers, nanoscale detectors, RF resonators, and vacuum microelectronic components. There is a pressing need to significantly improve chip-scale micropump performance (capable of operating at ~10^-6 Torr in a volume smaller than 1 CM^3) and this program will develop a high-performance integrated low-power microscale pumping capability. Additionally, the microresonator effort has the potential to provide a universal communications receiver that is able to reconfigure and operate under any communication standard, anywhere from an urban setting to an outer space environment. The program will transition via industrial performers.
Document Details
- Document Type
- Accomplishment
- Publication Date
- Oct 01, 2012
- Source ID
- 919965b7c1db9cb34021b63ba3b9605b