PARTICLE SIZE DISTRIBUTION MEASUREMENTS WITH ELECTRONIC INSTRUMENTATION BASED UPON LIGHT SCATTERING

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1956
Accession Number
AD0106711

Entities

People

  • Chester T. O'konski
  • M.d. Bitron
  • W.i. Higuchi

Organizations

  • University of California, Berkeley

Tags

DTIC Thesaurus Topics

  • Instrumentation
  • Light Scattering
  • Measurement
  • Measuring Instruments
  • Particle Size
  • Particles
  • Scattering
  • Scatterometers

Technology Areas

  • Microelectronics