Method of Making Self Aligned Silicon-Gate Transistors.
Abstract
The patent application concerns a method for fabricating silicon gate field effect transistors by depositing layers of silicon and polycrystalline silicon onto a sapphire or spinel substrate.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 17, 1974
- Accession Number
- AD0164756
Entities
People
- R. S. Ronen
Organizations
- United States Department of the Air Force