STUDY OF LI-0 INTERACTION IN SI BY ION DRIFT

Abstract

ION DRIFT IN A REVERSE-BIASED NP JUNCTION HAS BEEN USED TO MEASURE EFFECTIVE DRIFT MOBILITIES OF LI(+) BETWEEN 20 C AND 125 C IN SI SAMPLES CONTAINING OXYGEN CONCENTRATIONS UP TO 1.3 TIMES 10 TO THE 18TH POWER ATOMS/CC. UNDER SUCH CONDITIONS THE LI(+) AND OXYGEN WILL COMBINE TO FORM A COMPLEX OF THE FORM LIO(+). THE RATIO OF THE EFFECTIVE DRIFT MOBILITY OF LI(+) IN SUCH SAMPLES TO THE KNOWN DRIFT MOBILITY OF FREE LI(+), WHEN MEASURED AS A FUNCTION OF TEMPERATURE, CAN BE USED TO DETERMINE THE DISSOCIATION CONSTANT OF LIO(+). AT HIGH OXYGEN CONCENTRATIONS THE EFFECTIVE DRIFT MOBILITY IS FOUND TO BE INVERSELY PROPORTIONAL TO THE OXYGEN CONCENTRATION, IN ACCORDANCE WITH THE MODEL. THE USE OF THIS TECHNIQUE FOR THE MEASUREMENT OF OXYGEN CONCENTRATIONS BELOW 10 TO THE 17TH POWER ATOMS/CC IS DISCUSSED, AND SOME EXAMPLES OF SUCH MEASUREMENTS ARE GIVEN

Document Details

Document Type
Technical Report
Publication Date
Jan 10, 1961
Accession Number
AD0250671

Entities

People

  • E.m. Pell

Organizations

  • General Electric

Tags

DTIC Thesaurus Topics

  • Measurement
  • Mobility

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Semiconductor Device Technology