A HIGH VACUUM GAUGE CALIBRATION SYSTEM
Abstract
An ultra-high vacuum type metal and glass system was constructed for the purpose of calibrating vacuum gauges in the pressure region from 760 to 10 to the -7th power torr. The high vacuum portion of the system is bakeable at temperatures up to 450 C. A mercury manometer serves as a pressure standard in the region from 760 to 20 torr, and three specially designed, bakeable McLeod gauges with overlapping pressure ranges serve as pressure standards in the region from 20 torr to 1 x 1/10,000 torr. Theoretical accuracies of 1 percent or better are expected for the McLeod gauge readings in this pressure region. Pressures from 1 x 1/10,000 torr to 10 to the -7th power torr region can be measured, but the accuracy of the readings depends on adsorption and outgassing effects. Results pertaining to the reproducibility of measurements and comparisons of various gauge readings are presented. A pressure rise measurement technique is used to determine how the vacuum gauges and other system components are behaving. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 17, 1960
- Accession Number
- AD0256163
Entities
People
- Wallace S. Kreisman