SPECTROGRAPHIC ANALYSIS OF SEMICONDUCTOR AND RELATED MATERIALS

Abstract

This report includes: BIBLIOGRAPHY OF ANALYTICAL METHODS FOR THE DETERMINATION OF SMALL AMOUNTS OF ALUMINUM, ANTIMONY, ARSENIC, BORON, GALLIUM, GERMANIUM, INDIUM, PHOSPHORUS AND SULFUR IN HIGH PURITY SILICON, by A. P. Scanzillo. 14 Mar 61. (Contract AF 19(604)3469) Spectrographic techniques were developed for the analysis of trace impurities in semiconductor and related materials. Various chemical concentrational procedures and spectrographic techniques were investigated. The analytical methods of activation analysis, solid mass spectrometry, and emission spectroscopy were refined to give specific determinations in the parts per billion range. Considering cost and the availability of a reactor, emission analysis offers the widest and most practical application.

Document Details

Document Type
Technical Report
Publication Date
Mar 14, 1961
Accession Number
AD0259060

Entities

People

  • James M. Morris

Tags

DTIC Thesaurus Topics

  • Aluminum
  • Antimony
  • Availability
  • Bibliographies
  • Compound Semiconductors
  • Contracts
  • Electronics
  • Elements
  • Emission
  • Emission Spectroscopy
  • Germanium
  • Mass Spectrometry
  • Materials
  • Semiconductors
  • Spectrometry
  • Spectroscopy

Fields of Study

  • Materials science

Readers

  • Analytical Chemistry
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics