A METHOD FOR FABRICATING THIN FERROELECTRIC FILMS OF BARIUM TITANATE

Abstract

A new method of generating thin (2 microns) ferroelectric films of BaTiO3 was developed. The process consists essentially of the deposition in a vacuum of alternate layers of BaO and TiO2 onto a platinum substrate, followed by a heat treatment in air to react these compounds to form BaTiO3.An electrode can then be applied on top of the film to form a ferroelectric capacitor. the technique has resulted in films which contain a significant amount of BaTiO3 and which exhibit the characteristic hysteresis in the charge-voltage relation of a ferroelectric material. However, there is a lack of quantitative agreement between the measured film parameters and the generally accepted bulk values. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1961
Accession Number
AD0259333

Entities

People

  • John P. Green Jr

Organizations

  • Massachusetts Institute of Technology

Tags

DTIC Thesaurus Topics

  • Agreements
  • Barium
  • Barium Titanates
  • Capacitors
  • Electrodes
  • Elements
  • Ferroelectric Materials
  • Heat Treatment
  • Hysteresis
  • Materials
  • Metals
  • Platinum
  • Substrates
  • Titanates

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.