THE EFFECTS OF RF ENERGY ON THE PUMPING SPEED OF A TITANIUM SPUTTER PUMP
Abstract
For certain applications greater pumping speed of the sputter pump is desirable. The pumping speed is directly dependent on the s rength of the applied magnetic field, the value of the anode voltage, and the area of the titanium cathodes. The difficulty in increasing the pumping speed by varying the anode voltage or the area of the cathodes is that of providing the associated large magnetic fields. For this reason, a standard sputter pump was modified and the introd ction f RF energy was explored to see if the pumping speed would increase. The RF energy was applied at the ion cyclotron frequency of the ionized gas in the system. The ions should gain energy and therefore an increase in pumping speed would be observed. The results of this experiment show that the p mping speed is not increased by the introduction of RF energy. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 18, 1961
- Accession Number
- AD0260599
Entities
People
- J.f. Fry
Organizations
- University of California, Berkeley