ULTRASONIC GRINDING TECHNIQUES IN MICROMINIATURIZATION
Abstract
Ultrasonic impact grinding techniques are shown to be extremely useful in the fabrication of microcircuit substrates and other specialty component parts. Pertinent parameters of machine operation and tool design are discussed and detailed examples of applications are given. These include the fabrication of (1) sections of glass only 0.005 in. in thickness, (2) multihole substrates, (3) Hall measurement specimens, (4) tiny toroids, and (5) spiral grooves.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 28, 1961
- Accession Number
- AD0261593
Entities
People
- John Krawczyk
Organizations
- Harry Diamond Laboratories