SPUTTERING. A BIBLIOGRAPHY OF THEORY AND EXPERIMENTAL RESULTS

Abstract

Originally this search was made to collect information on the effects of sputtering on the surface properties of materials used in space vehicles. Since in this area the literature is limited, the search was expanded to include any reference related to sputtering. The types of sputtering included are cathode, ion, and particle. Sputtering as a means of depositing thin films of metals was not included. This bibliography reflects the holdings of the Technical Information Center, Lockheed Missiles + Space Company. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1961
Accession Number
AD0266558

Entities

People

  • W.l. Hollister

Organizations

  • Lockheed Martin Missiles and Space

Tags

Communities of Interest

  • Weapons Technologies

DTIC Thesaurus Topics

  • Bibliographies
  • Films
  • Literature
  • Materials
  • Particles
  • Spacecraft
  • Sputtering
  • Surface Properties
  • Technical Information Centers
  • Thin Films
  • Vehicles

Readers

  • Library and Information Science
  • Semiconductor Device Technology

Technology Areas

  • Space
  • Space - Hall-Effect Thruster