SPUTTERING YIELDS
Abstract
This report includes: PHYSICAL SPUTTERING, by G. K. Wehner. 1961. SPUTTERING YIELDS OF METALS FOR Ar(+) AND Ne(+) IONS WITH ENERGIES FROM 50 TO 600 EV, by Nils Laegreid and G. K. Wehner. 24 Aug 60. (Work was partly supported by Office of Naval Research and Air Force Cambridge Research Center contracts; Reprint from Jnl. of Applied Physics 32:365-369, Mar 61) SPUTTERING YIELDS FOR LOW ENERGY He(+)- AND Xe(+)-ION BOMBARDMENT, by D. Rosenberg and G. K. Wehner. SPUTTERING AT VERY LOW ION ENERGIES, by Robley V. Stuart and G. K. Wehner. 1960. (Reprint from 1960 Seventh National Symposium on Vacuum Technology Transactions) (Work is partly sponsored by AFCRC and ONR contracts) SPUTTERING YIELDS AT VERY LOW BOMBARDING ION ENERGIES, by R. V. Stuart and G. K. Wehner. 1961. (Sponsored by Office of Naval Research) DEPENDENCE OF SPUTTERING YIELDS ON TARGET TEMPERATURE. 1961.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1961
- Accession Number
- AD0267458
Entities
People
- D. Rosenberg
- G.k. Wehner
- R.v. Stuart