PILOT LINE PRODUCTION OF PASSIVE ELEMENTS BY CATHODOLYSIS

Abstract

Dielectric films formed by the interaction of an electron beam with adsorbed styrene vapors were used to prepare 100 to 1500 micromicrofarad capacitors with electrode areas of 0.028 and 0.0066 sq cm. Resistive films were formed by evaporating Zn at low pressures onto a glass substrate which was sensitized by electron beam bombardment in the presence of low pressure vapor. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1962
Accession Number
AD0270534

Entities

People

  • William J. Burkhard

Tags

DTIC Thesaurus Topics

  • Capacitors
  • Dielectric Films
  • Electrodes
  • Electron Beams
  • Electrons
  • Films
  • Production
  • Substrates

Fields of Study

  • Physics

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene