PLANAR INTEGRATION OF THIN FILM FUNCTIONAL CIRCUIT UNITS

Document Details

Document Type
Technical Report
Publication Date
Nov 30, 1961
Accession Number
AD0272567

Entities

People

  • R.l. Bullard
  • W.n. Carroll

Organizations

  • International Business Machines Corporation (Armonk, NY)

Tags

DTIC Thesaurus Topics

  • Films
  • Thin Films