MICROELECTRONIC CIRCUITRY IN MICRO-MODULES
Abstract
The microminiaturization of a Signal Corps air encoder subassembly is described. The subassembly is a shift register consisting of 28 flip-flops, 1 gate, and 3 driver circuits. These circuits are to be vacuum deposited on .310 inch square glass substrates and then stacked into micro-modules .625 inches in height. The techniques involved in monitoring the vacuum deposition of all films are discussed. Also discussed is a multiprobe jig which makes contact to 22 terminals of a deposited flip-flop and a mask changer which allows the changing of 4 masks without breading vacuum. Maximum accumulated mask registration tolerance is +/- .003 inches.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 30, 1961
- Accession Number
- AD0273728
Entities
People
- Hannsjörg A. Weber
- L. Gille
- S. Weld