MINIATURE THIN-FILM INDUCTORS
Abstract
Work is presented on the fabrication of thin-film inductors on bulk ferrite substrates and on the deposition of thin ferrite films with a practical permeability and Q value as measured at 1 mc. The problems encountered with fabricating coils of increased inductance on commercial ferriteARE REVIEWED AND METHODS FOR OVERCOMING THESE ARE DISCUSSED. A number of techniques for the deposition of thin films of ferrite material are presented with emphasis on a method for the pyrolitic hydrolysis of metal inorganic salts to form films of the suitable oxides on selected substrates. Means for compositional, structural and magnetic analysis of the ferrite films is also included.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 20, 1962
- Accession Number
- AD0273835
Entities
People
- F. R. Gleason
Organizations
- Motorola Mobility