MINIATURE THIN-FILM INDUCTORS

Abstract

Work is presented on the fabrication of thin-film inductors on bulk ferrite substrates and on the deposition of thin ferrite films with a practical permeability and Q value as measured at 1 mc. The problems encountered with fabricating coils of increased inductance on commercial ferriteARE REVIEWED AND METHODS FOR OVERCOMING THESE ARE DISCUSSED. A number of techniques for the deposition of thin films of ferrite material are presented with emphasis on a method for the pyrolitic hydrolysis of metal inorganic salts to form films of the suitable oxides on selected substrates. Means for compositional, structural and magnetic analysis of the ferrite films is also included.

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Document Details

Document Type
Technical Report
Publication Date
Mar 20, 1962
Accession Number
AD0273835

Entities

People

  • F. R. Gleason

Organizations

  • Motorola Mobility

Tags

Communities of Interest

  • Advanced Electronics
  • Weapons Technologies

DTIC Thesaurus Topics

  • Air Gaps
  • Coercivity
  • Decomposition
  • Films
  • Hydrolysis
  • Inductance
  • Inductors
  • Magnetic Fields
  • Magnetic Moments
  • Magnetic Properties
  • Materials
  • Measurement
  • Navy
  • Oxide Films
  • Substrates
  • Temperature Gradients
  • Thin Films

Readers

  • Electronics Engineering
  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.