THE DEPENDENCE OF THE DIFFUSIVITIES OF UMPURITIES IN SILICON ON BACKGROUND DOPING AND SURFACE CONCENTRATION

Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1962
Accession Number
AD0274969

Entities

People

  • Joseph Tsai
  • M.o. Thurston

Organizations

  • Ohio State University

Tags

DTIC Thesaurus Topics

  • Diffusivity