PRODUCTION REFINEMENT OF HIGH STABILITY FIXED FILM RESISTORS

Abstract

High stability Chromium-Titanium-Nitride resistors were produced by high vacuum evaporation of Chromium-Titanium alloys on carefully cleaned alumina substrates, nitriding the evaporated film at 1000 C, and heat treating the nitrided film at 350 C. (Author)

Document Details

• Document Type: Technical Report
• Publication Date: Oct 01, 1961
• Accession Number: AD0277366

Entities

People

• Gaylord A. Swartz
• William E. McLean

Tags

DTIC Thesaurus Topics

• Alloys
• Chemical Compounds
• Chromium
• Evaporation
• Film Resistors
• Heat Energy
• High Vacuum
• Nitrides
• Nitriding
• Production
• Resistors
• Substrates
• Titanium
• Titanium Alloys
• Vacuum

Readers

• Thin Film Deposition Science.