CHEMICAL VAPOR DEPOSITION

Abstract

Papers on chemical vapor deposition including possibilities and problems of chemical vapor deposition, growth of crystalline films, whisker growth, vapor deposition of diffusion coating, vapor-phase transfer processes. Contents: The Promise and Problems of Chemical Vapor Deposition; High-Purity Metal Production; Coating of Particles; Molecular Electronics; Refractory Metal Coatings; Corrosion-Resistant Coating; Pyrolytic C; Refractory Carbon; Growth of Crystalline Films and Layers by Chemical Vapor Deposition; Bulk Deposits; Thin-Films and Epitaxial Growth; Whisker Growth; Metal-Organic Decomposition; Mechanisms For Metal Alkyl Decomposition; Stable Organic Molecule; Decomposition of Tetraphenylsilane; Decomposition of Tetracyclohexylsilane; Chemical Vapor Deposition of Diffusion Coatings; Vapor- Phase-Transfer Processes During Vapor Deposition; Surface Deposition - Gas Kinetics Controlling; Surface Deposition - Gas Diffusion Controlling; Problems Requiring Additional Research.

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Document Details

Document Type
Technical Report
Publication Date
Jun 04, 1962
Accession Number
AD0281887

Entities

Organizations

  • Battelle Memorial Institute

Tags

Communities of Interest

  • Advanced Electronics
  • Weapons Technologies

DTIC Thesaurus Topics

  • Chemical Reactions
  • Chemical Synthesis
  • Chemistry
  • Coatings
  • Composite Materials
  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Heat Energy
  • Heat Transfer
  • Mass Transfer
  • Materials
  • Materials Processing
  • Materials Science
  • Sheet Metal
  • Silicon Compounds
  • Thermodynamics

Fields of Study

  • Materials science

Readers

  • Surface Engineering/Surface Coating Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene