THE SPUTTERING OF COMPOUNDS

Abstract

Sputtering yield data, atom ejection patterns, and sputtered film composition all support a molecular sputtering mechanism of GaSb. The surface structure models used to explain the atom ejection patterns are discussed. Selective sputtering of Ga was noted. Considerable information was obtained concerning the sputtering of diamond structure materials. (Author)

Document Details

Document Type
Technical Report
Publication Date
Sep 20, 1962
Accession Number
AD0294120

Entities

People

  • D. Shooter
  • E.j. Zdanuk
  • S. Wolsky

Organizations

  • RTX

Tags

DTIC Thesaurus Topics

  • Ejection
  • Materials
  • Sputtering

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.