SEMICONDUCTOR RESISTIVE ELEMENT
Abstract
The general objective of producing a low temperature coefficient of resistance (TCR) device from a miconductor material was only partially successful. Typical TCR device values above room temperature were never much lower than 150 ppm/C for the silicon resistive element investigated. Low temperature TCR values (at -50 C) were around 500 ppm/C. Load-life stability and resistance to environments (moisture, oxidation) proved as good or better than thinfilm resistors on the market. Specific problems encountered (such as ohmic contacts, resistance adjustment, junction effects, etc.) and their solutions are discussed in detail. A manufacturing procedure for producing a polycrystalline silicon device is included.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 31, 1962
- Accession Number
- AD0297034
Entities
Organizations
- Texas Instruments