RESEARCH AND DEVELOPMENT FOR SURFACE PROTECTION FOR SILICON DEVICES Open PDF Document Details Document Type Technical Report Publication Date Oct 01, 1962 Accession Number AD0400279 Entities People H. C. Evitts H. W. Cooper Organizations Motorola Mobility Tags DTIC Thesaurus Topics Accuracy Air Force Alkaline Earth Metals Barium Oxides Chemistry Coatings Dielectric Strength Electronics Elements Government Procurement Governments Materials Measurement Oxide Films Oxides Silicon Dioxide Surface Finishing