INVESTIGATION OF HIGH POWER GASEOUS ELECTRONICS
Abstract
Investigation of the cleanup and thermal recovery of inert gases at the interface between a high power microwave gas discharge and a quartz surface. Cleanup and thermal recovery of inert gases at the interface between a high power microwave gas discharge and a quartz surface have been investigated. Comparable cleanup and recovery characteristics were observed for argon and krypton gases. Both the total number of atoms sorbed while the discharge was on and thermally desorbed when the discharge was terminated were proportional to the square root of time. Analysis of the data indicates that cleanup and recovery are controlled by activated diffusion processes.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 15, 1963
- Accession Number
- AD0403871
Entities
People
- Harold S. Maddix
Organizations
- M/A-COM Technology Solutions