PRODUCTION ENGINEERING MEASURE FOR GALLIUM ARSENIDE VARACTOR DIODE

Abstract

Studies to obtain the processes necessary for the high-volume production of gallium arsenide varactor diodes are described. These investigations include diffusion, ohmic contacts, junction formation and packaging. A diffusion process utilizing zinc and arsenic as a diffusant source is described as well as a low-resistance, P-type contact and a successful procedure for a uniform mesa formation.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Feb 28, 1963
Accession Number
AD0405775

Entities

People

  • T. Baker

Organizations

  • Sylvania Electric Products

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Contracts
  • Diodes
  • Electronics
  • Engineering
  • Fabrication
  • Gallium Arsenides
  • Industrial Preparedness
  • Materials
  • Measurement
  • Metal-Semiconductor Junctions
  • Procurement
  • Production
  • Production Engineering
  • Semiconductor Devices
  • Semiconductor Diodes
  • Semiconductors
  • Varactor Diodes

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems