FILM THICKNESS CONTROL BY MEANS OF A CRYSTAL RESONATOR

Abstract

The article describes a method of continuous control, by means of a quartz resonator, of the thickness of thin metallic films prepared in a vacuum by evaporation or any other means. The maximum sensitivity of the method is 10 to the -9th power g/sq cm. Calibration data are given for a 16-Mc quartz crystal. The method may also be applied to the study of cathode and certain surface phenomena.

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Document Details

Document Type
Technical Report
Publication Date
Jun 19, 1963
Accession Number
AD0408614

Entities

People

  • A.i. Akishin
  • V.s. Zazulin

Organizations

  • Library of Congress

Tags

Communities of Interest

  • Advanced Electronics
  • Ground and Sea Platforms

DTIC Thesaurus Topics

  • Dielectric Films
  • Electrodes
  • Electronic Equipment
  • Equations
  • Films
  • Frequency
  • Frequency Meters
  • Frequency Shift
  • Government Procurement
  • Materials
  • Measurement
  • Oscillators
  • Quartz Resonators
  • Resonant Frequency
  • Resonators
  • Sputtering
  • Thin Films

Fields of Study

  • Physics

Readers

  • Thermal Physics or Thermal Science.