FILM THICKNESS CONTROL BY MEANS OF A CRYSTAL RESONATOR
Abstract
The article describes a method of continuous control, by means of a quartz resonator, of the thickness of thin metallic films prepared in a vacuum by evaporation or any other means. The maximum sensitivity of the method is 10 to the -9th power g/sq cm. Calibration data are given for a 16-Mc quartz crystal. The method may also be applied to the study of cathode and certain surface phenomena.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 19, 1963
- Accession Number
- AD0408614
Entities
People
- A.i. Akishin
- V.s. Zazulin
Organizations
- Library of Congress