EFFECTS OF PROTON IRRADIATION ON THE PROPERTIES OF SILICON,
Abstract
Diffusion enhancement, revealed by the displace ment of a p-n junction, in silicon crystals proton-irradiated at high temperature has been studied previously. In the present work Lang's method has been used to study the defects created by irradiation. It has been found that the whole thickness of the crystal may be perturbed and that this perturbation disappears if the region 10 microns from the surface (penetration depth of the protons) where the defects were created is etched away. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 25, 1963
- Accession Number
- AD0413309
Entities
People
- A. Authier
- J. C. Pfister
- P. Lallemand
Organizations
- École Normale Supérieure