ELECTRON MICROPROBE DEVELOPMENTS FOR INTEGRATED CIRCUIT RESEARCH

Abstract

Analytic examination of semiconductor surfaces is possible using electron beams. Previous elec tron microprobe work in this field is reviewed; promising analytic methods for the future and fundamental limitations in the formation of electron microprobes are discussed. This research, which stresses analysis of semiconductor (or thin film) surfaces, thus complements the reports of Shoulders (1960) and Wells (1961), who stress fabrication of active circuits using electron beam techniques.

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Document Details

Document Type
Technical Report
Publication Date
Oct 22, 1962
Accession Number
AD0413790

Entities

People

  • T. E. Everhart

Organizations

  • University of California, Berkeley

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • California
  • Cathode Ray Tubes
  • Deflection Coils
  • Electron Beams
  • Electron Lenses
  • Electron Microscopes
  • Electron Microscopy
  • Electron Optics
  • Electronics Laboratories
  • Fabrication
  • P-N Junctions
  • Scanning Electron Microscopes
  • Semiconductor Devices
  • Semiconductors
  • Thin Films
  • United States

Readers

  • Combustion science or combustion engineering.
  • Integrated Circuit Design and Technology.
  • Plasma Physics.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene