MINIATURE THIN FILM INDUCTORS (MODIFICATION NO. 2).
Abstract
Research concerns a program to develop a method for fabricating miniature inductors employing thin-film spiral conductors in combination with bulk-ferrite substrates and deposited ferrite films. The inductance range to be obtained is from 38 to 1000 microhenries with Q-values in excess of 100 measured at 1 mc. The work is organized under two tasks. The first task con cerns the development of methods for fabricating spiral conductors from a material that will with stand the rather severe ferrite-film deposition environment. Gold appears to be the suitable material. The development of a method for fabri cating spiral coils using photo-resist etch techniques of vacuum and electrodeposited thick films of gold were unsuccessful due to resist failure in the etching solution. Reverse-etch techniques, using a variety of materials to delineate a spiral, were also unsuccessful. A technique is being developed for directly evapor ating the spiral coil through two properly aligned metal masks. Presently, this technique is capable of producing air core coils of 0.5 microhenry, and means for increasing coil value to 1.58 microhenries are under investigation. The second task is devoted to the development of compatible processing techniques for manu facturing ferrite films whose properties are reproducible. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1963
- Accession Number
- AD0418031
Entities
People
- F.r. Gleason
Organizations
- Motorola Mobility