THE PREPARATION AND METAL PLATING CHARACTERISTICS OF FLUORINATED ACETYLACETONATE METAL CHELATES,
Abstract
Chemical approaches to depostion of thin films of metals, and the preparation of metal chelates from which metal films were deposited were investigated. It was of interest to determine whether the metal chelates would undergo reactions to yield the desired metal plates. The study revealed that the tri- and hexa-fluorinated acetylacetonate metal chelates were highly volatile, thermally stable, and readily undergo gas-phase reactions. Several metal chelates were prepared using the ammonium tri- or hexa-fluoroacetylacetonate salts as reaction intermediaries. The relative sublimation temperatures of these chelates range from 40 to 225 C and the thermal decomposition temperatures range from 250 to 450 C. In hydrogen at atmospheric pressure, deposits of copper, nickel, cobalt and lead were formed at plating temperatures of 300 to 450 and deposition rates up to 2,300 angstroms per minute. These plating reactions regenerate the free chelating agent which may be recycled into the chelating reaction. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1963
- Accession Number
- AD0418556
Entities
People
- Lyle B. Spendlove
Organizations
- Air Force Institute of Technology