PRODUCTION ENGINEERING MEASURE FOR GALLIUM ARSENIDE VARACTOR DIODE.

Abstract

Studies to obtain the processes necessary for the high volume production of gallium arsenide varactor diodes are described in this report. These investigations include studies of mesa contacts, epitaxial material, packaging, ohmic contacts and etching procedures. The results of the fabrication of completely epitaxial diodes and diffused epitaxial diodes are dis cussed as well as controlable etching procedures for volume production. (Author)

Document Details

Document Type
Technical Report
Publication Date
May 31, 1963
Accession Number
AD0419585

Entities

People

  • C.f. Davis
  • E.j. Feldman

Organizations

  • Sylvania Electric Products

Tags

DTIC Thesaurus Topics

  • Diodes
  • Engineering
  • Fabrication
  • Gallium
  • Gallium Arsenides
  • Materials
  • Metal-Semiconductor Junctions
  • Packaging
  • Production
  • Production Engineering
  • Production Management Methods
  • Productivity
  • Varactor Diodes

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Systems Analysis and Design

Technology Areas

  • Microelectronics