THIN FILM ACTIVE DEVICES.
Abstract
Experimental troubles encountered in developi5g the low energy electron beam experiment were eliminated. Controlled reactive evaporation of thin A12O3 films was achiev5d. Such films produced at low deposition rates are continuous down to very small thicknesses and show substantial departure 6rom bulk density. A study of such layers as blocking layers for MEA devices and as hot electron tu5nel emitters has begun. MEA triodes fabricated with reactively evaporated A12O3 layers to provide modulat6r isolation showed unusual aging effects. Immediately after fabrication, low gm values are observed; these increase f6r several weekb and then stabiliie. The firbt radiation damage test of MEA devices shows no degradation of gain for these devices for a neutron dose of 7 x 10 to the 12th power net. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 22, 1963
- Accession Number
- AD0420582
Entities
People
- James P. Spratt