A THICKNESS MONITOR FOR THIN FILMS OBTAINED BY VACUUM SPRAYING (INDIKATOR TOLSHCHINY TONKIKH SLOYEV, POLUCHAYEMYKH METODOM VAKUUMNOGO RASPYLENIYA MATERIALOV),

Abstract

A device is described which allows one to monitor the thicknesses of thin films (not more than 2 times 10 to the 4th minus 3 times 10 to the 4th angstroms) of a practically unrestricted class of materials obtained by vacuum spraying. It is shown that if the densities of the substances to to be sprayed on are known, it suffices to carry out the calibration just for one material. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 07, 1963
Accession Number
AD0421460

Entities

People

  • A. A. Korsunskiy
  • I. G. Razumnov

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Calibration
  • Films
  • Materials
  • Thick Films
  • Thickness
  • Thin Films

Readers

  • Information Retrieval
  • Mathematics or Statistics
  • Thin Film Deposition Science.