RESEARCH ON VACUUM EVAPORATED AND CATHODE SPUTTERED THIN FILMS.
Abstract
Some 1,000 metal films were deposited by vacuum evaporation or sputtering on glass or monocrystals of NaC1, MgO or LiF and the structures of 628 were analyzed by electron or X-ray diffraction. A yield of 24% parallelly oriented (PO) films for the total effort was increased to 49.5% during the last 10 months; a yield > 80% could be expected by utilizing the best techniques developed. For films of gold and silver deposited on NaC1 by evaporation a closed oven was found conducive to successful PO film growth; temperatures and rates employed were, respectively, 210 -300 C and 200-300 A/min for gold and 130 -220 C and 120-800 A/min for silver. PO gold (35) and silver (23) films were deposited on NaC1 by sputtering with yields greater than 60% at temperatures of 110 -310 C for gold and 25 -130 for silver. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1963
- Accession Number
- AD0422916
Entities
People
- Richard B. Belser
- William E. Woolf
Organizations
- Georgia Tech