INVESTIGATION OF HIGH POWER GASEOUS ELECTRONICS
Abstract
Clean-up and thermal recovery of inert gases at the interface between a high power microwave discharge and a quartz interface were further investigated. The ion flux to the discharge wall was measured and was found to remain constant during a given clean-up run. The ion flux only varied by a factor of 2 for the five inert gases studied. From the experimental results it is evident that residual impurity gases desorbed from the walls of the clean-up vacuum system significantly affect initial clean-up and recovery behavior.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 15, 1963
- Accession Number
- AD0423900
Entities
People
- C. S. Ward
- H. S. Maddix
- J. Gregory
Organizations
- M/A-COM Technology Solutions