RESEARCH AND DEVELOPMENT FOR SURFACE PROTECTION FOR SILICON DEVICES,
Abstract
This report describes the progress made during this period in the control and application of semiconductor device surfaces, and in the electrical evaluation of device passivation coatings. Lithium peroxide controlled ambient material was applied to a substantial number of high reliability diffused switching transistors which have demonstrated favorable life test results. Surface oxidation by solution treatments has demonstrated improved collector breakdown voltage characteristics in a number of germanium alloy devices. A hypothetical model is proposed for alumina-silica films, and preliminary evaluations of an experimental film are presented. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 14, 1963
- Accession Number
- AD0426002
Entities
People
- H. W. Cooper
- M. A. Hall
- S. S. Flaschen
Organizations
- Motorola Mobility