THIN FILM TECHNIQUES FOR SILICON INTEGRATED CIRCUITS.

Abstract

Contents: Introduction; the effect of thin film processing on device characteristics; resistors; Resistor passivation; Capacitors; Introduction; Aluminum silicate capacitors; Preliminary electrical evaluations; Tantalum capacitors; Circuit vehicle; Interconnections; Control pattern; and Control pattern operation. (Author)

Document Details

• Document Type: Technical Report
• Publication Date: Sep 15, 1963
• Accession Number: AD0426050

Entities

People

• Eugene Blanchette
• Richard B Wilson

Organizations

• Motorola Mobility

Tags

Communities of Interest

• Advanced Electronics

DTIC Thesaurus Topics

• Aluminum
• Capacitors
• Circuits
• Electronic Components
• Electronic Equipment
• Films
• Integrated Circuits
• Passive Electronic Components
• Resistors
• Silicates
• Tantalum
• Tantalum Capacitors
• Test And Evaluation
• Thin Films

Fields of Study

• Engineering

Readers

• Electrical Engineering
• Pavement Materials Engineering.
• Semiconductor Device Technology