EVAPORATED THIN-FILM TECHNIQUES.
Abstract
The requirements peculiar to active integrated circuit elements are set forth in detail and the present characteristics of the thin-film transistor (TFT) are measured against these requirements. Some of the problems impeding successful utilization of the TFT in integrated circuits were solved, but others persist. None of these difficulties are believed to be fundamental to the operation of the device. The design and fabrication of an integrated amplifier and an integrated shift register employing TFT 's is described. The techniques required for TFT fabrication were found compatible with those used for thin-film passive component fabrication. A summary of TFT fabrication techniques is given. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 31, 1963
- Accession Number
- AD0426170
Entities
People
- R. E. Quinn
Organizations
- RCA Corporation