LOW-COST MICROCIRCUITS.

Abstract

Research on thin-film, low-cost resistor elements was initiated. Multi-layered films were deposited by vacuum and electroless deposition techniques on ceramic substrates to form microcircuit boards. The multi-layered films were reduced to resistor elements by subtractive methods, utilizing xerographic methods in the stencilingetching procedure. After fixtures were developed to handle the micro-module wafers, resistors were fabricated and initial resistor data taken. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1963
Accession Number
AD0426413

Entities

People

  • C. Mytych

Organizations

  • Xerox

Tags

DTIC Thesaurus Topics

  • Films
  • Microcircuits
  • Resistors
  • Substrates
  • Thin Films

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Integrated Circuit Design and Technology.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene