Low Energy Electron Diffraction from Single Crystal Surfaces. I. Apparatus Design.

Abstract

A low energy electron diffraction apparatus has been designed, developed, and constructed and will be used to study the surface condition and structure of single crystal metals and semicon ductors. The electron gun is adapted from a design by Farnsworth, uses a nickel matrix cath ode, and is capable of producing electrons with energies of 20 to several hundred electron volts with currents from 0.1 to 10 microamperes. The electrons diffracted from a surface can be scanned over a majority of an octant (0-75 degree colatitude 0-90 degree azimuth) using the general approach of Farnsworth, and currents as low as 1 times 10 to the -13th power amperes can be measured at the collector. An angle pro grammer has been developed to precisely program the angles to be swept, and the angular motion is transferred through a glass chamber wall by a pair of magnetic couplers. The apparatus and some of its characteristics are described. (Author)

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1963
Accession Number
AD0426752

Entities

People

  • D.e. Floyd
  • E.l. Kern
  • P.w. Bunce

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accumulators
  • Angular Motion
  • Crystals
  • Diffraction
  • Electron Diffraction
  • Electron Guns
  • Electrons
  • Single Crystals
  • Surface Properties

Fields of Study

  • Physics

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Electronics Engineering
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics