ACTIVE THIN FILM PROGRAM.
Abstract
The purpose of this work was to develop techniques for vacuum evaporation single crystal semiconductor films of germanium and/or silicon on insulating substrates. Basic feasibility studies of the films for use as active circuit elements in microelectronic assemblies, techniques for controlled doping, and fabrication of prototype elements and assemblies to prove feasibility of the processes and compatibility with vacuum deposited passive elements were included. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 22, 1963
- Accession Number
- AD0427338
Entities
People
- Milo Macha