EVAPORATED THIN-FILM DEVICES.

Abstract

Research concerned thin-film devices which had evaporated. The operating characteristics of the insulated-gate thin-film transistor (TFT) are shown in good agreement with a simple field-effect analysis. A coplanar-electrode TFT structure has yielded improved performance and is simpler to fabricate than the earlier staggeredelectrode structure. A p-type TFT, having excellent enhancement-type characteristics, was made using evaporated tellurium as the semiconductor. Studies of mobility in the space-charge layer using the TFT as a research tool have shown the existence of barriers between crystallites in a polycrystalline cadmium sulfide film. (Author)

Document Details

Document Type
Technical Report
Publication Date
Oct 31, 1963
Accession Number
AD0427362

Entities

People

  • A. Waxman
  • F. V. Shallcross
  • H. Borkan
  • P. K. Weimer
  • V. E. Henrich

Organizations

  • Sarnoff Corporation

Tags

DTIC Thesaurus Topics

  • Compound Semiconductors
  • Crystallites
  • Films
  • Polycrystals
  • Semiconductor Devices
  • Semiconductors
  • Silicon Carbide
  • Space Charge
  • Thin Film Transistors
  • Thin Films
  • Transistors

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Space