EFFECTS OF ELECTRON-SURFACE INTERACTION IN IONIZATION GAUGES,

Abstract

A systematic study of an anomalous nonlinearity in ionization gauges was made, indicating the magnitude of possible errors in ionization gauge readings. The errors are particulary enhanced after O2 has been introduced into the system. Evidence was provided for interpreting the effect as due to dissociative ionization by electron impact at the grid surface. At low values of grid current, there is an enhanced rate of production of such ions accompanied by a reduced rate of collection in a Bayard-Alpert gauge. The anomalous readings in ionization gauges can be reduced greatly by thorough outgassing of the grid by electron bombardment. Thereafter, operation at electron currents of 5 ma or greater gives reliable readings. In the presence of O2 a number of other effects may be present to give erroneous ionization gauge readings; in particular, composition of the gas may be altered, both by chemical reactions at the hot filamant and by electron bombardment of adsorbed gases. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1963
Accession Number
AD0427830

Entities

People

  • D. Alpert
  • J. L. De Segovia
  • W. C. Schuemann

Organizations

  • University of Illinois Urbana–Champaign

Tags

DTIC Thesaurus Topics

  • Chemical Reactions
  • Dissociation
  • Electrons
  • Ionization
  • Outgassing
  • Production

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Plasma Physics.
  • Theoretical Analysis.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems