INVESTIGATION OF HIGH POWER GASEOUS ELECTRONICS.
Abstract
Clean-up and thermal recovery of inert gases at the interface between a high-power microwave discharge and a quartz surface have been further investigated. Using representative gas samples, the square root clean-up rate was found to be independent of fill pressures in the .5 Torr to 5 Torr range. The square root clean-up rate was observed to increase linearly with the square root of the incident peak power. Neon was ound to have an activation energy of 11.3 KCal/mole for diffusion in quartz. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 15, 1963
- Accession Number
- AD0431041
Entities
People
- C. S. Ward
- H. S. Maddis
- J. Gregory
Organizations
- M/A-COM Technology Solutions